Integrally gated carbon nanotube field emission cathodes produced by standard microfabrication techniques

Guillorn MA; Hale MD; Merkulov VI; Simpson ML; Eres GY; Cui H; Puretzky AA; Geohegan DB

Journal of Vacuum Science & Technology B, Vol.21, No.3, 957-959, 2003

Guillorn MA, Hale MD, Merkulov VI, Simpson ML, Eres GY, Cui H, Puretzky AA, Geohegan DB

The fabrication of carbon nanotube (CNT)-based field-emission devices has recently been an area of intense investigation. Here, we report a simple process for the fabrication of integrally gated CNT field-emission cathodes that uses standard microfabrication techniques. The operation of 3 X 3 field-emitter arrays produced using this process was investigated and found to behave in a manner consistent with the Fowler-Nordheim model of field emission. (C) 2003 American Vacuum Society.