화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.21, No.3, 996-999, 2003
Fabrication of multiwalled carbon nanotube bridges by poly-methylmethacrylate suspended dispersion
We report on the fabrication of multiwalled carbon nanotube (MWCNT) bridges using poly-methylmethacrylate (PMMA) suspended dispersion. This method makes it possible to suspend nanotubes between metal electrodes, without any chemical etching of the substrate, and to remove unwanted nanotubes from the substrate. Using a spacer layer of PMMA with a known thickness, it is also possible to control the suspended height of the MWCNT bridges. The electrical,measurement results on suspended MWCNT bridges reveals that the room temperature resistance ranges from under a kOmega to a few MOmega, with the majority around 2-4 kOmega. It was shown that a plasma-enhanced chemical vapor deposition grown MWCNT with a diameter similar to55 nm can sustain current densities-of similar to10(8) A/cm(2), which will make them suitable for applications as integrated field emission cathodes. (C) 2003 American Vacuum Society.