Membrane-based separation processes are new technology combined membrane separation with conventional separation. Hydrophobic porous membranes are often used in these processes. The structure of hydrophobic porous membrane has significant effect on mass transfer process. The permeabilities of five kinds of gas, He, N-2, O-2, CO2 and water vapor, across six polytetrafluoroethylene(PTFE) flat membranes were tested experimentally. Results indicated that the greater the membrane mean pore size and the wider the pore size distribution are, the higher the gas permeability. A gas permeation model, including the effects of membrane structure parameter and gas properties, was established. A comprehensive characteristic parameter (including porosity, thickness and tortuosity) was found more effective to express the influence of membrane structure in gas permeation process. The predicted permeation coefficients were in good agreement with experimental data.