Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.22, No.22, 1603-1606, 2003 DOI10.1023/A:1026340625900 Export Citation Microstructure of ZnO/Cu/TaN/SiO2/Si multilayers prepared by sputter deposition Wu WY, Ting JM Please enable JavaScript to view the comments powered by Disqus.
