The possibility to prepare and use submicrometer-sized patterns in successive functionalization reactions with quaternary ammonium salts and (functional) chlorosilanes, as well as cationic gold nanoparticles, is presented. Submicrometer-sized structures were prepared by local probe oxidation of octadecyl trichlorosilane fanctionalized silicon wafers. By this method, patterns were oxidized with 40-nm resolution, which can be used in local surface functionalization reactions. The principle of subsequent functionalization, either with additional quaternary ammonium salts or by a polymer grafting reaction, has been demonstrated.