Aerosol-gel process is a deposition method based on the sol-gel polymerization of a liquid film produced from an ultrasonically sprayed aerosol. This process offers an attractive alternative for the deposition of photocurable SiO2-TiO2 ORMOSIL films. 3-(trimethoxysilyl) propylmethacrylate and tetraisopropyl-orthotitanate complexed with methacrylic acid were used as sol-gel precursors. Doping with a terbium: sulphosalicylic acid complex was also studied to test the deposition of spectroscopically active photocurable films. FTIR spectroscopy has been used to study the precursor solutions and ORMOSIL films. It is shown that titanium precursor incorporation enhances the solution reactivity, which yields optical quality thin films. Photopolymerization and photoluminescence properties of the films are reported and discussed with respect to the experimental parameters. The results allow envisaging the UV-imprinting fabrication of Aerosol-gel-derived active waveguides. (C) 2004 Kluwer Academic Publishers.