Effects of annealing temperature on the carrier concentrations, the carrier mobilities and the quality of nitrogen doped ZnO films deposited by magnetron sputtering

Lim JM; Shin KC; Lee CM

Journal of Materials Science, Vol.39, No.9, 3195-3197, 2004

DOI10.1023/B:JMSC.0000025857.63690.67 Export Citation

Effects of annealing temperature on the carrier concentrations, the carrier mobilities and the quality of nitrogen doped ZnO films deposited by magnetron sputtering

Lim JM, Shin KC, Lee CM

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