화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.21, No.5S, S15-S18, 2003
Major advances in transfer pumps: 1953-2003
The major advances made in the design and operation of transfer pumps (i.e., vacuum pumps that transfer gas from a vacuum system to the atmosphere) during the lifetime of the American Vacuum Society (1953-2003) are reviewed. Included are diffusion, turbomolecular, and oil-free mechanical pumps. (C) 2003 American Vacuum Society.