Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.21, No.5, L13-L15, 2003 DOI10.1116/1.1590963 Export Citation Controlling the composition of Ti1-xAlxN thin films by modifying the number of TiN and AIN subcycles in atomic layer deposition Lee YJ, Kang SW Please enable JavaScript to view the comments powered by Disqus.
