Ion implantation method is applied to synthesize B-C-N hybrids and their electronic structures are characterized by x-ray photoelectron spectroscopy. A boron nitride film is deposited on a graphite target by borazine plasma implantation. At the interface between the BN film and the graphite, a variety of bonding combinations including B-N, B-C, and C-N are observed. This proved that B-C-N hybrids are formed by this method. (C) 2003 American Vacuum Society.