3 mum thick ferroelectric PbZrxTi1-xO3 films with x=0.4 and 0.5 have been fabricated on LaNiO3 coated silicon substrates by a modified sol-gel process. X-ray diffraction analysis shows that the films exhibit highly (100)-preferred orientation (alpha(100)>99%) and a single perovskite phase. Atomic force microscopy study shows that specimens possess smooth surfaces. The prism-film coupling measurement indicates that the system with the configuration of PbZr0.5Ti0.5O3/PbZr0.4Ti0.6O3/air can be used for a planar optical waveguide. (C) 2004 American Vacuum Society.