화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.22, No.2, 729-735, 2004
Investigation of nanocrystal-(Ti,AI)N(1-x)amorphous-SiNy composite films
Nanocrystal-(Ti,Al)N1-x/amorphous-SiNy composite films were prepared by the magnetron sputtering codeposition process. The effects of deposition parameters on the composition, microstructure, and mechanical properties of nanocomposite films were investigated. Results indicated that the composition of nanocomposite films could be controlled through the codeposition process. Nanocrystal (Ti,Al)N1-x embedded in amorphous SiNy matrix with (200) preferred orientation was observed. The content of amorphous SiNy has substantial influence on the nanocrystallite size, columnar structure, surface morphology, and hardness. (C) 2004 American Vacuum Society.