A hybrid-type chemical solution deposition (CSD) process for the fabrication of dense proton conducting BaZr0.80Y0.20O(3-x) (BZY20) films has been developed. The propionate based precursor solution showed an excellent long-term stability of more than 6 months. From XRD and SEM studies, phase purity and the microstructure are determined. Proton conductivity of the 630-nm-thick BZY20 film deposited on a platinized silicon substrate was established by impedance spectroscopy. The obtained resistances are, however, much higher than for true bulk samples. Possible reasons for this discrepancy are discussed. (C) 2003 Elsevier B.V. All rights reserved.