The SrRu1-xFexO3 films (x = 0.0, 0.1, 0.3, 0.5) were successfully fabricated using the powders coated with SiO2 nano-particles (approximate to30 nm). The SrRu1-xFexO3 powders (approximate to500 nm) were synthesized by a conventional solid-state reaction. Thanks to the fused SiO2 nano-particles in the vicinity of the glass softening temperature at approximately 700 degreesC, the SrRu1-xFexO3 powders are strongly attached onto the surface of the glass substrate. The various techniques were performed to characterize the films, such as X-ray photoelectron spectroscopy, field emission-scanning electron microscopy, Mossbauer spectroscopy and resistivity measurements. This simple and low-cost method to get the SrRu1-xFexO3 films (x=0.0, 0.1, 0.3, 0.5) may promise for applications to microelectronics field, such as dynamic random access memory or ferro-electric random access memory. (C) 2003 Elsevier B.V. All rights reserved.