We studied the direct micropatterning of a lanthanum-based thin film on a template of self-assembled monolayers in an aqueous solution at 80degreesC. The template composed of silanol and octadecyl areas was prepared by UV-modified octadecyltrichlorosilane SAMs through a photomask. The amorphous La2O(CO3)(2)(.)xH(2)O thin films were selectively deposited in the silanol regions. Crystallized La2O3 was obtained after heating at 800degreesC in air. (C) 2004 Elsevier Inc. All rights reserved.