The influence of electron irradiation on the controversially discussed monolayer structure of H2O on NaCl(100) is investigated with helium atom diffraction before and after a low-damage low-energy electron diffraction (LEED) experiment. The ordered (1x1) structure observed initially with He atoms is found to be transformed to a stable c(4x2) structure after a 90 eV electron dosage of only 10(15) electrons cm(-2) or about 2 incident electrons per adsorbate molecule. Based on previously reported structure models for the two phases, the transition is attributed to a reorientation, and a possible compression of the water film induced by the electrons. (C) 2004 American Institute of Physics.