ZnO micropatterns were synthesized site-selectively on self-assembled monolayer templates in an aqueous solution of zinc nitrate and dimethylamine-borane at 55 C by an electroless deposition process. The effects of postdeposition annealing on the luminescence properties were investigated. For the as-grown samples, broad visible-light emission (500- 800 nm) was mainly observed. When the sample was annealed above 150 C, the intensity of the visible light luminescence decreases and the ultraviolet exciton emission (377 nm) was exhibited. The UV intensity peaked at 300 C. The change of the luminescence coincided with the decrease in the amount of H2O in ZnO, which was analyzed using thermal desorption spectroscopy and infrared spectroscopy. Patterned monochromatic UV cathodoluminescence imaging was demonstrated for microlines of the ZnO pattern for the sample annealed at 300 C. (C) 2004 The Electrochemical Society.