A superhydrophobic ZnO thin film was fabricated by the Au-catalyzed chemical vapor deposition method. The surface of the film exhibits hierarchical structure with nanostructures on sub-microstructures. The water contact angle (CA) was 164.3degrees, turning into a superhydrophilic one (CA < 5degrees) after UV illumination, which can be recovered through being placed in the dark or being heated. The film was attached tightly to the substrate, showing good stability and durability. The surface structures were characterized by scanning electron microscopy and atomic force microscopy.