Well-defined silver and gold dendrites are prepared on silicon substrates in aqueous fluoride acid solution containing AgNO3 and KAuCl4, respectively. In cases of electroless platinum and copper deposition in fluoride acid solution, no corresponding metal dendrites but platinum microcrystallines and copper granular-crystallines are formed. Our experiments found that the morphological selection of electroless metal deposits is related to the microstructure of etched silicon. A possible template mechanism and affecting factors for the morphological selection of electroless metal deposits are discussed. (C) 2004 Elsevier Ltd. All rights reserved.