UV-Raman spectroscopy is demonstrated to be a valuable tool to study molybdenumoxide model catalysts at ambient pressure while visible light Raman yields no information. UV-Raman offers the possibility to characterize MoOx/Al2O3/Si and MoOx/SiO2/Si model systems with sub-monolayer loading of MoOx even though the surface area of a Si-wafer is much lower than that of a bulk support. Anchoring of MoOx onto Al2O3/Si and SiO2/Si results in similar molybdenum oxide compounds as for bulk catalysts.