Methods for hybridization of silent discharge plasma and catalysts in different forms are presented, and their synergy in benzene decomposition is discussed. TiO2 deposition on the inside wall of the coaxial type of the silent discharge plasma reactor promotes benzene decomposition in air and increases CO2 yield. TiO2-Silica gel granules housed inside of the punched internal electrodes also facilitate the oxidative decomposition of benzene. Comparison of the TiO2 surface before and after the reactions by FTIR suggests that the positive effect of TiO2 can be ascribed to the active oxygen species generated on its surface. Replacement of TiO2-Silica gel by MnO2 also promotes the oxidative decomposition of benzene in silent discharge plasma. Ozone, which is generated from gaseous oxygen, is decomposed by MnO2, but not by TiO2 Catalytic effects of TiO2 and MnO2 can be ascribed to formation of active oxygen species on their surfaces and that of the triplet oxygen atom from ozone on the MnO2 surface. It has been shown that both of TiO2 and MnO2 can sustain their catalytic activities in silent discharge plasma. (C) 2003 Elsevier B.V. All rights reserved.