화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.22, No.3, 1463-1467, 2004
Solid-source molecular-beam epitaxy growth of GaInNAsSb/InGaAs single quantum well on InP with photoluminescence peak wavelength at 2.04 mu m
Single quantum wells In0.53Ga0.47As/Ga0.47In0.53N0.021As0.949Sb0.03/In0.53Ga0.47As with room-temperature photoluminescence peak wavelength at 2.04 mum were grown on InP substrate by solid-source molecular-beam epitaxy (MBE). In situ reflection high-energy electron diffraction was used to monitor the MBE growth. Double-crystal high-resolution x-ray diffraction and secondary ion mass spectrometry were utilized to characterize the samples and optimize the growth conditions. The roles of nitrogen and antimony atoms in the growth of quinary material, GaInNAsSb, were investigated. (C) 2004 American Vacuum Society.