The residual stress in ZrO2 thin films prepared by electron beam evaporation was measured by viewing the substrate deformation using an optical interferometer. The influences of deposition temperature and deposition rate on the residual stress have been studied. The results show that residual stress in ZrO2 thin films varies from tensile to compressive depending on deposition temperature and deposition rate, respectively. The value of compressive stress increases with the increasing of deposition temperature and deposition rate. At the same time, X-ray diffraction measurement was carried out in order to examine the crystallization behavior of the ZrO2 thin films as a function of deposition temperature and deposition rate. The relationship between the residual stress and the microstructure has also been discussed. (C) 2003 Elsevier B.V. All rights reserved.