화학공학소재연구정보센터
Thin Solid Films, Vol.460, No.1-2, 201-205, 2004
Effects of surface treatment of field emitter arrays on electrical characteristics of active matrix cathode
The effects of a wet chemical surface treatment of molybdenum-tip (Mo-tip) emitters on the electrical characteristics of an active matrix cathode composed of hydrogenated amorphous silicon thin film transistors and Mo-tip emitters are described. X-Ray photoelectron spectroscopy measurements showed that the surface treatment removed MoO3 from the surface of the e-beam evaporated Mo film. In addition, the surface roughness of the Mo film was increased as the result of the surface treatment. The surface-treated active matrix cathode showed stable emission characteristics and immunity from emitter failures during its operation. The response time of the active matrix cathode was decreased by the surface treatment of the Mo-tip emitters. A change in surface composition and surface roughness appear to be responsible for the enhancement of the active matrix cathode. (C) 2004 Elsevier B.V. All rights reserved.