We report studies of photoluminescence from polycrystalline ZnO films deposited on sapphire as a function of the in situ oxygen pressure during growth and ex situ annealing. The ultraviolet photoluminescence was observed to increase by more than two orders of magnitude as a result of the annealing treatment. Enhanced cathodoluminescence was observed from the same films. The role of oxygen defects is discussed. (C) 2004 Elsevier B.V. All rights reserved.