화학공학소재연구정보센터
Thin Solid Films, Vol.460, No.1-2, 247-255, 2004
Determination of the optical properties of non-uniformly thick non-hydrogenated sputtered silicon thin films on glass
An improved envelope method (EM) is presented in this paper that allows the determination of the refractive index (n(f)) and absorption coefficient (alpha) of non-uniformly thick, absorbing films on a slightly absorbing substrate from a single transmission measurement. The limitation of the previous version of the EM [R. Swanepoel, J. Phys. E: Sci. Inst. 17 (1984) 896] only permitted the evaluation of samples that exhibited a transparent region in the near infrared (NIR). As an initial test of the improved EM, n(f) and alpha(f) of a 0.5-mum thick epitaxially grown silicon-on-sapphire (SOS) film were determined over the range of 1.1-3.2 eV, with increased absorption being observed at the silicon: sapphire interface. Subsequently, sputtered amorphous silicon (a-Si) films, which exhibit absorption throughout the visible-NIR spectrum, were successfully characterised and a definite trend towards lower absorption coefficients for films deposited at higher temperatures was observed. After the a-Si films were subjected to solid phase crystallisation (SPC), increased sub-bandgap absorption was attributed to higher defect levels in the films, which also resulted in amorphous features remaining in the Raman spectra. (C) 2004 Elsevier B.V. All rights reserved.