The magnetic states of 10 ML Fe films grown on inclined Al2O3(0001) substrates were investigated in the transition region of superparamagnetic to ferromagnetic states. The ratio of the superparamagnetic and ferromagnetic components is dependent on both the growth temperature and the inclination of the substrate. The maximum ratio of the ferromagnetic to superparamagnetic was observed in ultrathin Fe films grown on flat substrates at a growth temperature of 473 K. The difference in crystallinity of Fe at each temperature explains the observed behavior. On the other hand, the ratio of ferromagnetic to superparamagnetic components for Fe films grown on inclined substrates behaves in a complex manner with the growth temperature and is also influenced by the uniaxial magnetic anisotropy, which is induced by the inclination of substrate. (C) 2004 Elsevier B.V. All rights reserved.