Nano-structured Mo2C thin films were grown on Si(100) by metal-organic chemical vapor deposition using MO(CO)(6) as precursor. Well crystalline thin films could be synthesized only in the case where the precursor vapor was present before deposition temperature was rapidly reached. A reaction scheme is postulated. The formation of benzene from methane over the nano-structured Mo films has been observed in micro-reactor studies and confirms that Mo2C + MoO3 are an active catalyst for methane conversion. (C) 2004 Elsevier B.V. All rights reserved.