We report a fabrication of organic light-emitting diodes (OLEDs) based on soluble phenyl-substituted poly-p-phenylene-vinylene (Ph-PPVs) thin films with aluminum cathode prepared by ion-beam-assisted deposition (IBAD). The electrical properties of the aluminum cathode, prepared by IBAD, on Ph-PPV have been investigated and compared to those by thermal evaporation. Energetic particles of Al assisted by an Ar+ ion may damage the organic material generating undesirable leakage current even though a thin Al buffer layer is applied to avoid Ar+-ion-induced damages. Substantial improvements of passivation characteristics were observed in IBAD device because the dense Al cathode inhibits the permeation of H2O and O-2 into Ph-PPV film through pinhole defects, and thus retards dark spot growth. These results may be deduced from the highly packed structure that has small contact resistance between Al and Ph-PPV in ion-beam-assisted aluminum devices. (C) 2004 American Vacuum Society.