Four different pressure swing adsorption (PSA) cycles using CMS for oxygen purification were developed to produce high-purity oxygen of over 99% with a high level of productivity. The cyclic performances such as purity, recovery, and productivity of the four different PSA cycles were experimentally and theoretically compared under non-isothermal conditions. In addition, one binary (O-2/Ar; 95:5 vol%) and two ternary (O-2/Ar/N-2; 95:4:1 and 90:4:6vol%) mixtures were used to study the effects of feed composition. The PSA cycles with two consecutive blowdown steps produced oxygen with 98.0-99.9% purity and 56-66% recovery. The PSA cycle with oxygen generation in the second blowdown step produced oxygen with a higher level of purity and productivity. Also, the cycle introducing a pressure equalization step instead of a purge step produced oxygen with about 99.8% purity and 78% recovery. The period for the cyclic steady state of the ternary feed with 1% N-2 was slightly longer than that of the binary feed, while the PSA performance of the ternary feed was similar to that of the binary feed without nitrogen. However, in the ternary feed with 6% N-2, the purity of the O-2 in the purification cycles decreased by up to 97.3%. Therefore, nitrogen played a key role in producing high-purity oxygen in the CMS PSA instead of argon. 2004 Elsevier Ltd. All rights reserved.