A dense layer of yttria-stabilized zirconia (YSZ) was deposited on a porous substrate by a modified type of electrochemical vapor deposition (EVD) technique, making use of dissociated oxygen from nickel oxide in the porous substrate as an oxygen source for the reaction. As the oxygen-supplying substrates, NiO-ceria porous pellets containing some depressions on the deposited face were used to fabricate modified planar-type SOFC based on the rough anode of Ni-ceria. The dissociated oxygen electrochemical vapor deposition (DOEVD) technique was very suitable for fabrication of this type of cell. (C) 2004 Elsevier B.V. All rights reserved.