We demonstrate that homogeneous Cd1-xZnxS thin films can be synthesized from chemical bath deposited CdS/ZnS multilayers through low-temperature chemical and thermal-activated diffusion. The secondary ion mass spectrometry depth profiles indicate that Cd diffuses into ZnS film more readily than Zn diffuses into Us film. We also demonstrated how this approach could be used in improving the spectral response of CdTe-based solar cells. (C) 2004 Elsevier B.V. All rights reserved.