PbZrO3 (PZO)/PbTiO3 (PTO) artificial superlattices were fabricated by pulsed laser deposition, and their structural and dielectric properties were investigated. Epitaxial PbTiO3 (PTO) and PbZrO3 (PZO) layers were alternately deposited on La0.5Sr0.5CoO3 (LSCO) (100)/ MgO (100) substrate at 500 Cdegrees with various stacking periods from 1 to 100 unit cells. The (100) plane spacing (d(100)) of the superlattices increased with decreasing the stacking period, and the corresponding dielectric constant was drastically improved. The dielectric constant of the superlattice reached 800 at a stacking period of 1 unit cell/1 unit cell (PZO(1)/PTO1). With small stacking periods (PZO(1)/PTO(1)and PZO(2)/ PTO2 unit cells), superlattices exhibited the capacitance-voltage hysteresis, i.e., ferroelectric behavior. (C) 2004 Elsevier B.V. All rights reserved.