(Ba,Sr)TiO3 films were prepared on Pt/Ti/SiO2/Si substrates by mirror-confinement-type electron cyclotron resonance (ECR) plasma sputtering as well as by metal-organic decomposition (MOD). The films prepared by ECR plasma sputtering were crystallized at lower temperatures with better crystallinity and a denser structure than those by MOD. As for dielectric constant, films prepared by ECR plasma sputtering exhibited a relatively high value over 500 at a low annealing temperature of 873 K, whereas films by MOD exhibited approximately 350. This is attributed to the better crystallinity and the denser structure of the films by ECR plasma sputtering. The leakage current density of the films was found to be similar in both processes. (c) 2004 Elsevier B.V. All rights reserved.