TiAlCrN coatings were reactively sputtered from a Ti0.37Al0.51Cr0.12 alloy target in this study with a nitrogen partial pressure ranging from 0% to 25% of the total pressure. The effects of the incorporation of nitrogen into the coatings on the hardness, elastic modulus, and chemical state of the metal atoms in the coatings were. investigated. The hardness and reduced modulus of the coatings increased with increasing nitrogen partial pressures. The formation of ternary nitrides was inferred from the noticeable difference in the chemical states from those for the corresponding binary nitrides. (C) 2005 American Vacuum Society.