CrSix, Cr/CrSix/Cr/CrSix and CrSix/Si/CrSix/Si formed on alumina have been analyzed for electrical properties. An as-deposited CrSix shows metallic nature, but the annealed sample shows semiconducting behavior. An annealed Cr/CrSix/Cr/CrSix shows an upward curvature of resistance curve. An annealed CrSix/Si/CrSix/Si shows metallic nature. The heating and cooling time of the last sample are the shortest. Auger analysis shows that the structure is a layer of a mixture of Si and CrSi2. The Si-rich CrSi2 layer is desirable as the heating material of thin film heater. (c) 2004 Elsevier B.V. All rights reserved.