Previous Article Next Article Table of Contents Journal of the Electrochemical Society, Vol.152, No.5, L9-L9, 2005 DOI10.1149/1.1894400 Export Citation ALD of hafnium oxide thin films from tetrakis(ethylmethylamino)hafnium and ozone (vol 152, pg G213, 2005) Liu XY, Ramanathan S, Longdergan A, Srivastava A, Lee E, Seidel TE, Barton JT, Pang D, Gordon RG Please enable JavaScript to view the comments powered by Disqus.
