Previous Article Next Article Table of Contents Macromolecules, Vol.38, No.8, 3041-3043, 2005 DOI10.1021/ma0477798 Export Citation Synthesis of poly[N-(1-adamantyl)vinylsulfonamide-co-2-(2-methyl)adamantyl methacrylatel for 193 nm lithography Fukuhara T, Shibasaki Y, Ando S, Kishimura S, Endo M, Sasago M, Ueda M Please enable JavaScript to view the comments powered by Disqus.