Parameters of the hybrid hollow electrode activated discharge (H-HEAD) source for cold atmospheric plasma applications are described. The source with a simple cylindrical electrode terminated by a gas nozzle combines the microwave antenna plasma with the hollow cathode plasma generated inside the nozzle by a pulsed de power. The source can, produce over 15 cm long plasma plumes at less than 200 sccm of argon and 100 sccm of neon flowing in open air at the microwave power of 400 W (2.4 GHz). Parameters of the hybrid plasma are controlled by both the microwave power and the power delivered to the hollow cathode. An anomalous effect of a sharp increase in the length of the plasma plume at low gas flows is discussed. Results of the optical emission spectroscopy in argon and neon are presented. Optical spectra confirmed the presence of Ti and Fe from the hollow cathode in the plasma. The production of metal increases with the power applied to the hollow cathode. Traces of Ti from the hollow cathode have been found at substrates positioned as far as 2 cm from the cathode. This finding confirms the possibility to use the H-HEAD source for atmospheric physical vapor deposition (PVD) and hybrid PVD and plasma-enhanced chemical-vapor deposition of composite films. (c) 2005 American Vacuum Society.