We present a strategy of stress reduction in sputter deposited films by a nano-compliant layer at the substrate using physically self-assembled nanostructures obtained at high working-gas pressures prior to the deposition of a continuous film. This technique is all in situ, and the nanostructures are made of the same material as the deposited thin film and requires no lithography process. This nanostructured layer has a lower material density and can act as a compliant layer to reduce the stress of the subsequently deposited continuous film grown under low gas pressure. By using this approach we were able to reduce stress values significantly in sputter deposited tungsten films and the strategy of alternating high and low Ar gas pressures leads to the growth of much thicker films without delamination. (c) 2005 American Vacuum Society.