In this investigation, boiling incipience and bubble dynamics on a microheater with a geometry of 100 mu m x 100 mu m fabricated with MEMS technology are evaluated using a high-speed digital camera. For the purpose of comparison with conventional boiling heat transfer, boiling incipience and bubble dynamics are also studied on a carefully selected microheater with a fabricated defect (i.e., a microcavity on the heater surface). Of industrial interest are the effects of dissolved gases on boiling incipience and bubble dynamics, which are also discussed in detail. The possible nucleation temperature (or incipience temperature) is analyzed and discussed from the perspective of the measured bulk temperature of the microheater and a 3D heat conduction numerical model. The time-resolved bubble dynamics (i.e., the bubble size evolution, interface velocity and interface acceleration) are all presented along with high-speed digital images. Based upon this investigation, it is clear that explosive boiling can take place on a smooth surface no matter how slow the heating rate, and dissolved gases have a significant influence on the incipience temperature and bubble behavior. Furthermore, this study illustrates that the classical kinetics of boiling can explain the explosive boiling occurring on a smooth surface in principle and can provide a useful guide for the design of microscale heat transfer and/or MEMS devices. Although unexpected, due to the gravitational effects, Marangoni flow on the vapor-liquid interface induced by the temperature gradient was also observed. (c) 2005 Elsevier Ltd. All rights reserved.