International Journal of Heat and Mass Transfer, Vol.48, No.21-22, 4492-4497, 2005
Partly three-dimensional global modeling of a silicon Czochralski furnace. II. Model application: Analysis of a silicon Czochralski furnace in a transverse magnetic field
A three-dimensional (3D) global analysis was carried out numerically for a small silicon Czochralski (CZ) furnace in a transverse magnetic field by a proposed 3D global model. The modeling was conducted with moderate requirements of computer resources and computation time. Most 3D features of the melt flow and thermal field in the furnace could be reproduced in the modeling. The results showed that the melt-crystal interface shape is three-dimensional and temperature difference over the circumference on the crystal and crucible sidewalls is prominent. The non-uniformity of temperature in the azimuthal direction decreases with increase in distance from the melt region. The influence of a transverse magnetic field on the flow pattern of melt and global thermal field in the furnace was analyzed. (c) 2005 Elsevier Ltd. All rights reserved.
Keywords:computer simulation;global modeling;Czochralski method;transverse magnetic field;semiconducting silicon