화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.152, No.11, B435-B440, 2005
Electrochemical behavior of bis(beta-diketonate)copper complexes
The use of copper to produce interconnects for microchip manufacture has prompted a renewed interest in its corrosion, deposition, and passivation processes. The aqueous electrochemistry of four bis(beta-diketonate)copper complexes (where beta-diketone = acacH, tfacH, hfacH, and tmhdH) in aqueous media has been investigated. Equilibrium constants were used to calculate potential-pH diagrams, varying the beta-diketone ligand, ligand and/or copper concentrations, and the ionic strength of the buffer solution. The theoretical potential-pH diagrams showed good correlation to the experimental data obtained in aqueous solutions. (c) 2005 The Electrochemical Society.