Isolated three-dimensional nanostructures were grown on templated or flat substrates by oblique angle deposition with or without substrate rotation where the physical shadowing effect dominates and controls the structures. The mechanical and electromechanical properties of Si springs and Co coated Si springs were measured by atomic force microscopy. The electrical property of ss-phase W nanorods were measured by scanning tunneling microscopy. Examples of measurements of the elastic property of springs, electromechanical actuation, field emission of electrons, and field ionization of argon gas are presented. Potential applications and improvements of growth of uniform nanostructures are discussed. (c) 2005 American Vacuum Society.