Journal of Vacuum Science & Technology A, Vol.23, No.6, 1732-1736, 2005
Tailored synthesis of TiC/a-C nanocomposite tribological coatings
Composite coatings made of nanocrystalline TiC (nc-TiC) particles and amorphous carbon (a-C) have been prepared in a double magnetron sputtering system using graphite and titanium targets under Ar bombardment. Chemical composition and microstructure of coatings were studied by transmission electron microscopy (TEM), electron energy loss spectroscopy (EELS), and x-ray diffraction (XRD) for a set of samples prepared varying the ratio and intensity of power applied to each magnetron. Changes in coatings microstructure, from a quasipolycrystalline TiC to a nanocomposite formed by nanocrystals of TiC embedded in an amorphous matrix of carbon (nc-TiC/a-C), are observed depending on the synthesis conditions. Tribological and mechanical properties of coatings were tested using a pin-on-disk tribometer and an ultramicrohardness indenter, respectively. Coatings with moderate hardness (7-27 GPa), low friction (0.1-0.2), and low wear rates (k similar to 10(-7) mm(3)/N m) were obtained. A percentage between 15% and 30% of TiC is found as an optimum value to get a good compromise between good mechanical and tribological properties. Finally, a mapping of the mechanical and tribological properties of the nc-TiC/a-C system is presented for the synthesis conditions employed. (c) 2005 American Vacuum Society.