The effect of temperature on the buildup of polyelectrolyte multilayers consisting of poly(styrenesulfonate) (PSS), poly(diallyldimethylammonium) (PDADMA), and poly(allylamine) (PAH) was studied by using a quartz crystal microbalance. The increase of temperature in the deposition process was shown to have a considerable effect on the rate of the layer-by-layer buildup. The effect of temperature on the PDADMA/ PSS deposition was found to be stronger than on the PAH/PSS deposition. The increasing temperature was found to extend the exponential buildup regime in all of the studied systems. A buildup model was created to simulate the buildup and to explain the effect of temperature. The model is based on the assumption that each deposition step leads to a quasi-equilibrium between the concentration of the polymer repeating unit in solution and the composition of the layer. According to the model, the layer-by-layer buildup is inherently exponential, becoming linear whenever diffusion is not fast enough to carry the polymer within the entire thickness of the film. This buildup model is discussed jointly with the earlier published three-zone model of the polyelectrolyte multilayers. The rate of the buildup is characterized by growth exponent. The temperature dependence of the growth exponent is discussed in connection with the thermodynamic parameters of the deposition.