화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.153, No.1, C19-C26, 2006
Effects of stain etchant composition on the photoluminescence and morphology of porous silicon
Stain etching of silicon provides a spontaneous, self-limiting chemical method to produce nanocrystalline silicon films (porous Si). Whereas the existence of etchants capable of producing porous Si has been known for some time, little has been known concerning how solution composition influences the efficacy of porous Si production and the properties of the resulting films. We demonstrate that the fluoride species may be derived from either HF or acidified NH4HF2. A range of oxidants may be used as long as their counterions do not lead to precipitation. However, a large positive electrochemical potential is not a sufficient condition for efficient porous Si production. Bubble production, which is deleterious to film homogeneity and long thought to be inherent to the process, can be avoided by the use of transition metal-containing oxidants. Properties of the film, such as morphology, growth rate, porosity, and the wavelength of the photoluminescence maximum, respond to the etchant composition. We observe a blue shift in photoluminescence, which correlates with an increasingly positive electrochemical potential (E-0) of the oxidant. It is argued that E-0 plays a role much like wavelength in photoelectrochemical etching and that smaller nanocrystals are produced with more positive values of E-0. (c) 2005 The Electrochemical Society.