Fe-doped TiO2 thin films were prepared in situ oil stainless steel substrates by liquid phase deposition, followed by calcination at various temperatures. It was found that some Fe3+ ions were in situ doped into the TiO2 thin films. At 400 degrees C, the film became photoactive due to the formation of anatase phase. At 500 degrees C, the film showed the highest photocatalytic activity due to an optimal Fe3+ ion concentration in the film. At 900 degrees C, the photocatalytic activity of the films decreased significantly due to the further increase of Fe3+ ion concentration, the formation of rutile phase and the sintering and growth of TiO2 crystallites. (c) 2005 Elsevier B.V. All rights reserved.