Distribution of: the electrical properties of indium-tin oxide (ITO) film prepared by both a planar-magnetron sputtering system (PMSS) and a facing-targets sputtering system (FTSS) at room temperature were investigated. It was found that the outstanding non- LI Ili fornii ties of the electrical properties in noncrystalline ITO films are mainly due to the variation of the oxygen stoichiometry dependent oil film positions on substrate surfaces. Furthermore, ITO film with uniform distribution of electrical properties was obtainable using FTSS. (c) 2006 American Vacuum Society.