화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.23, No.6, 2749-2753, 2005
Dynamic chromatic aberration correction in low energy electron microscopes
This paper presents a method of dynamically correcting for the chromatic aberration in pulsed gun low energy electron microscope systems. The proposal is based upon the use of a drift tube in combination with electron lenses whose focal strengths can be rapidly modulated. Simulation results that use direct ray tracing of electrons are presented for specific drift tube/correction lens combinations. (c) 2005 American Vacuum Society.